Electrical properties of diamond-like carbon films deposited using a filtered cathodic arc system

A new filter are deposition (FAD) system has been developed to satisfy the requirements of magnetic storage devices;. This work briefly describes the 45 degrees magnetic filter cathodic are deposition process and investigates how substrate bias, hydrogenating, and nitrogen-doping affect the electric al properties of amorphous diamond-like carbon films. Experimental results indicate that increasing in substrate bias and/or nitrogen doping into the film during the process would lower the resistance of the film. All these e vidences indicate the pout-deposited film is more "graphite-like". The effe ct of hydrogen flow in the film is less significant. It is believed that th e hydrogen can prevent the nucleation of the graphite phase, and can also s tabilize of sp(3) bonding. The phenomenon clearly indicates that the film i s more "diamond-like".