We report the synthesis of new superconducting Sr2CUO4-delta thin films (T-
c(onset) similar to 75 K) using molecular beam epitaxy (MBE). This supercon
ductor has a tetragonal structure with an in-plane lattice constant a(o) si
milar to 3.79 Angstrom and a c-axis lattice constant c(o) similar to 13.55
Angstrom. This c-axis lattice constant is significantly larger than previou
sly reported for this system. Strong oxidation using ozone gas at a low tem
perature of around 350 degreesC is essential to the realization of phase co
nversion from the orthorhombic insulating phase (Sr2CuO3) to the tetragonal
superconducting phase (Sr2CuO4-delta).