We demonstrate high resolution imaging with microfabricated, cantilevered p
robes, consisting of solid quartz tips on silicon levers. The tips are cove
red by a 60-nm thick layer of aluminium, which appears to be closed at the
apex when investigated by transmission electron microscopy. An instrument s
pecifically built for cantilever probes was used to record images of latex
bead projection patterns in transmission as well as single molecule fluores
cence. All images were recorded in constant height mode and show optical re
solutions down to 32 nm.