Near-field optical microscopy based on microfabricated probes

We demonstrate high resolution imaging with microfabricated, cantilevered p robes, consisting of solid quartz tips on silicon levers. The tips are cove red by a 60-nm thick layer of aluminium, which appears to be closed at the apex when investigated by transmission electron microscopy. An instrument s pecifically built for cantilever probes was used to record images of latex bead projection patterns in transmission as well as single molecule fluores cence. All images were recorded in constant height mode and show optical re solutions down to 32 nm.