We report on a method that allows the nanostructuring of surfaces with inte
nse laser pulses. For this purpose isolated polystyrene spheres with diamet
ers in the order of the laser wavelength were deposited on a silicon or gla
ss surface. Illumination with short and ultrashort laser pulses produced ho
les underneath these particles. Calculations of the field near the particle
s make clear that geometrical optics, that is, focusing by a spherical lens
, as well as near-field effects, contribute to the size and shape of these
holes. This technique can be utilized for the parallel structuring of large
surface areas with a single laser shot.