CHARACTERIZATION OF NICKEL-COPPER MULTILAYER AND COPPER THIN-FILM USING NEUTRON REFLECTIVITY MEASUREMENTS

The use of neutron reflectivity measurement for characterizing thin fi lms has become an important non-destructive tool. We have done a syste matic characterization study of 'Corning 7059' glass substrate, a copp er film and a nickel-copper multilayer deposited on this substrate by electron beam evaporation, using a neutron reflectivity measurement se t-up, designed by us, on an existing spectrometer in DHRUVA reactor, T rombay, India. We have been able to characterize thicknesses of the la yers with reasonable accuracy. Also we could detect a thin oxide layer on copper and interdiffusion at copper-nickel interfaces, with the pr esent instrumental resolution. (C) 1997 Elsevier Science B.V.