Scanning tunneling spectroscopy investigations have been carried out o
n electron beam deposited indium tin oxide films in air. The spectrosc
opic data exhibit characteristics typical of metal-insulator-semicondu
ctor structure, with a heavily doped semiconductor. The measurements h
ave yielded a band gap of about 3.5 eV, which is very close to the bul
k value. (C) 1997 Elsevier Science B.V.