Electron and Li ion conducting properties of room temperature sputtered amo
rphous tantalum oxide (a-Ta2O5) films were studied in order to evaluate the
feasibility of using a-Ta2O5 in electrochromic device applications. The fi
lms were investigated using the galvanostatic intermittent titration techni
que, impedance spectroscopy, and isothermal transient ionic current measure
ments. It was found that the a-Ta2O5 met two out of three requirements pose
d on a Li ion conductor in a WO3 based electrochromic device. There was a n
egligible intercalation in the potential window used in WO3-based electroch
romic devices (above 2.4-2.5 V vs. Li/Li+). Furthermore, in this potential
region, the chemical diffusion coefficient for Li was larger than the corre
sponding quantity in WO3. However, there was a nonzero electron conductivit
y in the a-Ta2O5 films, not observed in the chemical vapor deposition-made
beta -Ta2O5 investigated earlier. Still, the ionic conductivity was approxi
mately one order of magnitude larger than the electronic one. (C) 2001 The
Electrochemical Society.