Study of proton irradiation induced CVD diamond priming by lateral micro-ion beam induced charge technique

Lateral micro-ion beam induced charge (IBIC) is a powerful method to charac terize the electrical behavior of chemical vapor deposition (CVD) diamond t hin film and further to evaluate its quality. In the process of IBIC data h andling, a new model that the product of mobility and lifetime linearly inc reases from substrate side to growth side was proposed in order to separate ly analyze the carriers' contributions to charge collection efficiency. IBI C results shows that CVD diamond was primed by irradiation of 46 Gy proton dose with a 82.4% increase of average collection distance due to the space charge elimination inside the CVD diamond after irradiation. (C) 2001 Elsev ier Science Ltd. All rights reserved.