The relationship between the distribution and the dimension of fractal patt
erns in annealed Au/Ge bilayer films has been investigated. The variation o
f the single-fractal branch width can be shown by using a simple fractal di
mension. The nonuniform distribution of multiple-fractal patterns can be de
scribed quantitatively by using the multifractal spectra. It has been demon
strated that, when the fractals are fewer, they exhibit the greater nonunif
orm distribution and the multifractal spectrum is wider. We found that a fe
w fractal patterns distribute nonuniformly in film annealed at 100 degreesC
for 60 min, and that many fractal patterns distribute uniformly in whole f
ilm annealed at 120 degreesC for 60 min. Correspondingly, the width Delta a
lpha of multifractal spectra decreases from 3.70 to 0.23.