Thermoreflectance imaging of superlattice micro refrigerators

Authors
Christofferson, J Vashaee, D Shakouri, A Melese, P Fan, XF Zeng, GH Labounty, C Bowers, JE Croke, ET
Citation
J. Christofferson et al., Thermoreflectance imaging of superlattice micro refrigerators, P IEEE SEM, 2001, pp. 58-62
Citations number
9
Categorie Soggetti
Current Book Contents
Journal title
SEVENTEENTH ANNUAL IEEE SEMICONDUCTOR THERMAL MEASUREMENT AND MANAGEMENT SYMPOSIUM, PROCEEDINGS 2001 → ACNP
ISSN journal
10652221
Year of publication
2001
Pages
58 - 62
Database
ISI
SICI code
1065-2221(2001):<58:TIOSMR>2.0.ZU;2-0
Abstract
High resolution thermal images of semiconductor micro refrigerators are pre sented. Using the thermoreflectance method and a high dynamic range PIN arr ay camera, thermal images with 50mK temperature resolution and high spatial resolution are presented. This general method can be applied to any integr ated circuit, and can be used as a tool for identifying fabrication failure s. With further optimization of the experimental setup, we expect to obtain thermal images with sub-micron spatial resolution.