Characterisation of aluminium oxynitride gas barrier films

Citation
Ag. Erlat et al., Characterisation of aluminium oxynitride gas barrier films, THIN SOL FI, 388(1-2), 2001, pp. 78-86
Citations number
37
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
THIN SOLID FILMS
ISSN journal
00406090 → ACNP
Volume
388
Issue
1-2
Year of publication
2001
Pages
78 - 86
Database
ISI
SICI code
0040-6090(20010601)388:1-2<78:COAOGB>2.0.ZU;2-Q
Abstract
In the last decade, metal oxide layers deposited on polymer substrates have been utilised as gas barrier films in food packaging as an alternative to the traditional aluminium foil. The resistance of these composite films to gas transmission is controlled predominantly by nano-scale defects created during the fabrication of the oxide layer. The size and density of these de fects are believed to be strongly dependent on the intrinsic properties of the metal oxide laver. Changing the chemical composition of these coatings is one possible method to enhance the gas barrier properties of the films. In this work, aluminium oxynitride films, fabricated by reactive magnetron sputtering on Poly (ethylene terephthalate) substrates, have been investiga ted using a range of analytical techniques including: scanning proton micro probe; atomic force microscopy; scanning electron microscopy; transmission electron microscopy; uni-axial tensile testing; and gas permeation measurem ents to characterise the gas barrier properties of the film. The structural observations have been correlated with the measurements of the oxygen and water vapour permeation of the composite. Oxygen transmission rates as low as 1 cm(-3)/m(2) day . atm and water vapour transmission rates below 0.2 g/ m(2) day have been measured. and these competitive values can be explained by the relatively low density of defects in the barrier layers. (C) 2001 El sevier Science B.V. All rights reserved.