Compositional characterization of CrN films deposited by ion beam-assisteddeposition process on stainless steel

Thin films of technologically important chromium nitride, prepared using io n beam-assisted deposition (IBAD) on stainless steel, have been characteriz ed for their composition and thickness by backscattering spectrometry and g low discharge mass spectrometry (GDMS). The composition of the films was de termined by non-resonant N-14(p,p)N-14 backscattering using 1.6-1.73 MeV pr otons. The proton resonance N-14(p,p)N-14 scattering at E-p = 1.74 MeV and 3 MeV alpha -particle backscattering were used to measure the thickness of the films. The composition and thickness of the films estimated by the GDMS method are consistent with backscattering measurements. The factors leadin g to the formation of the peak observed at the iron edge of the: substrate in the backscattered spectra for both projectiles have been investigated. ( C) 2001 Published by Elsevier Science B,V. All rights reserved.