The main regularities of the method for producing films by sputtering targets with an ion beam

Authors
Smirnov, NN
Citation
Nn. Smirnov, The main regularities of the method for producing films by sputtering targets with an ion beam, J OPT TECH, 68(4), 2001, pp. 287-289
Citations number
3
Categorie Soggetti
Optics & Acoustics
Journal title
JOURNAL OF OPTICAL TECHNOLOGY
ISSN journal
10709762 → ACNP
Volume
68
Issue
4
Year of publication
2001
Pages
287 - 289
Database
ISI
SICI code
1070-9762(200104)68:4<287:TMROTM>2.0.ZU;2-4
Abstract
This paper presents the temperature and energy dependences of the process o f obtaining optical films by sputtering targets with a self-contained ion b eam. It is shown that these dependences must be taken into account when dev eloping specific processes and regulating the deposition conditions to obta in reproducible characteristics for the films. (C) 2001 The Optical Society of America.