Characteristics of the differential heterodyne microscope, studied by means of a periodic test structure

Authors
Baranov, DV Egorov, AA Zolotov, EM
Citation
Dv. Baranov et al., Characteristics of the differential heterodyne microscope, studied by means of a periodic test structure, J OPT TECH, 68(4), 2001, pp. 297-300
Citations number
8
Categorie Soggetti
Optics & Acoustics
Journal title
JOURNAL OF OPTICAL TECHNOLOGY
ISSN journal
10709762 → ACNP
Volume
68
Issue
4
Year of publication
2001
Pages
297 - 300
Database
ISI
SICI code
1070-9762(200104)68:4<297:COTDHM>2.0.ZU;2-I
Abstract
The transfer function of a differential heterodyne microscope is determined . using a metallized periodic test structure. Its sensitivity to changes in the parameters of the object is investigated. (C) 2001 The Optical Society of America.