The problem of electromagnetic shielding between elements of microelectroni
c circuits has been studied by using a new technique (the via holes techniq
ue). Metallic squares and truncated square cross sections approximate each
metallic circle cross section. A comparison between the adjacent and a stag
gered arrangement of via holes has been illustrated theoretically and exper
imentally. (C) 2001 John Wiley & Sons, Inc.