Silicon foundry fabricates microdisplay with liquid crystal on silicon

Authors
Chen, WS Melcher, R
Citation
Ws. Chen et R. Melcher, Silicon foundry fabricates microdisplay with liquid crystal on silicon, SOL ST TECH, 44(5), 2001, pp. 81
Categorie Soggetti
Eletrical & Eletronics Engineeing
Journal title
SOLID STATE TECHNOLOGY
ISSN journal
0038111X → ACNP
Volume
44
Issue
5
Year of publication
2001
Database
ISI
SICI code
0038-111X(200105)44:5<81:SFFMWL>2.0.ZU;2-W
Abstract
Modifications to a standard silicon foundry process flow are being used to manufacture liquid crystal on silicon microdisplays. Key improvements are i n the areas of planarization and reflectivity CMP and thin-film processes h ave been developed for the technology.