Infrared radiation transmission through GaAs/AlGaAs quantum well infrared photodetector

This paper discusses experimental and theoretical studies of the efficiency of optical coupling in GaBs/AlGaAs multiple-quantum-well-infrared photodet ectors (QWIPs) via-optical diffraction grating. Optical responsivity has be en studied to compare the effectiveness of different grating structures fab ricated by chemical wet and reactive ion etching (RIE) methods. By the uniq ue measurement of infrared radiation transmission spectrum of the QWIP syst em, we have clearly demonstrated the optical interference effect in the GaA s/AlGaAs active MQW layer and the potential utilization of the interference effect in designing and optimizing QWIP systems has been discussed, An opt ical grating processed by the RIE technique is advantageous due to its accu rate control over the feature size of optical apertures. (C) 2001 Academic Press.