Silicon deposition on AISI 304 stainless steel by CVD in fluidized bed reactors: analysis of silicide formation and adhesion of coatings

Silica/mullite multilayers are designed to protect materials against high t emperature corrosion. The deposition of these multilayer systems is perform ed using CVD in a fluidized bed reactor (CVD-FBR). The preliminary results of silicon layers deposited onto AISI 304 stainless steel by CVD-FBR obtain ed at 450 degreesC for different processing times are presented in the pres ent paper. Moreover, the effect of subsequent thermal treatments on the for mation of brittle silicides has been studied. The relationship between coat ings process, heat treatments and mechanical adhesion is established. (C) 2 001 Elsevier Science B.V. All rights reserved.