The design and implementation of a novel dynamic calibration technique for
shear-stress sensors is presented. This technique uses the oscillating wall
shear stress generated by a traveling acoustic wave as a known input to th
e shear-stress sensor. A silicon-micromachined, floating-element shear-stre
ss sensor has been dynamically calibrated up to 4 kHz using this method. Th
ese data represent the first broadband, experimental verification of the dy
namic response of a shear-stress sensor.