Ceramic MEMS - New materials, innovative processing and future applications

Authors
Liew, LA Zhang, WG An, LN Shah, S Luo, RL Liu, YP Cross, T Dunn, ML Bright, V Daily, JW Raj, R Anseth, K
Citation
La. Liew et al., Ceramic MEMS - New materials, innovative processing and future applications, AM CERAM S, 80(5), 2001, pp. 25-30
Citations number
10
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
AMERICAN CERAMIC SOCIETY BULLETIN
ISSN journal
00027812 → ACNP
Volume
80
Issue
5
Year of publication
2001
Pages
25 - 30
Database
ISI
SICI code
0002-7812(200105)80:5<25:CM-NMI>2.0.ZU;2-E