Scanning electron-beam dielectric microscopy for the temperature coefficient distribution of dielectric ceramics

Studies on scanning electron-beam dielectric microscopy (SEDM) are reported . This microscopy technique is used for determining the temperature coeffic ient distribution of dielectric materials using an electron-beam as a heat sourer instead of a light beam as in photothermal dielectric microscopy. Th is microscopy technique, which has the ability to simultaneously observe SE M images and the material composition by EPMA, has a resolution better than that of photothermal dielectric microscopy. To demonstrate the usefulness of this technique, the two-dimensional image of a two-phase composite ceram ic composed of TiO2 and Bi2Ti4O11 is measured. To shorten a measurement tim e, a new type of SEDM for measuring the real time transient response caused by a single pulsed electron-beam is also successfully developed.