We have developed an ultrafast carrier dynamics measurement method which pr
ovides both a transient reflecting grating signal and a transient reflectiv
ity signal. The method was used to measure the carrier dynamics at a silico
n surface in the carrier density range of 1.6-3.0 x 10(20) cm(-3), and the
diffusion coefficient of non-equilibrium electrons was determined by a comp
arison between the transient reflecting grating and transient reflectivity
signals. The diffusion coefficients increases as the carrier density become
s larger. This tendency is qualitatively in agreement with the theoretical
prediction that increase of diffusion coefficients is caused by a temperatu
re rise of the carriers and increase of their temperature gradient.