Laser bending of ceramics and application to manufacture magnetic head sliders in disk drives

Citation
Ac. Tam et al., Laser bending of ceramics and application to manufacture magnetic head sliders in disk drives, ANAL SCI, 17, 2001, pp. S419-S421
Categorie Soggetti
Spectroscopy /Instrumentation/Analytical Sciences
Journal title
ANALYTICAL SCIENCES
ISSN journal
09106340 → ACNP
Volume
17
Year of publication
2001
Pages
S419 - S421
Database
ISI
SICI code
0910-6340(2001)17:<S419:LBOCAA>2.0.ZU;2-T
Abstract
We have developed and implemented into high-volume manufacturing recently a new micro-laser-bending process, called Laser Curvature Adjust Technique ( LCAT), for fine adjustment of the curvature of the Air Bearing Surface (ABS ) of ceramic magnetic sliders. This process utilizes a compact diode-pumped Q-switched laser to produce photothermal scribe patterns on the back side (i.e. opposite side to the ABS) of the slider. The laser-scribed patterns c ause a permanent decrease in the compressive stress on the back side, and h ence cause the ABS side to bulge out (i.e., increase in crown). Extremely f ine control of the crown change is possible by performing the laser scribin g in "installments", as controlled by an in-situ optical curvature monitor at the ABS side. This "close-loop" Laser-bending process can produce desire d crown values to accuracies of a few nanometers.