Magnetic tunnel junctions with a barrier of tantalum oxide were prepared by
plasma oxidation of sputter-deposited tantalum. They show magnetoresistanc
e ratios of 2.5% at room temperature and 4% at low temperatures. The materi
al exhibits low barrier heights of similar to0.4 eV. This makes it possible
to substantially increase the barrier thickness, compared to a barrier of
aluminum oxide. The resulting decrease of coupling between the ferromagneti
c layers is easily seen. Tantalum oxide appears to be a candidate for use a
s a tunnel barrier of spin-dependent tunneling devices. (C) 2001 American I
nstitute of Physics.