Five free-standing polycrystalline diamond plates were grown by electron-as
sisted hot filament CVD on molybdenum using different deposition parameters
. The homogeneity of the elastic properties was studied for each side of th
e samples by surface acoustic waves (SAWs) using pulsed laser excitation an
d piezoelectric detection. From the velocities of the longitudinal acoustic
bulk waves (LABWs) and SAWs, values of the Poisson ratio of approximately
v = 0.14 +/- 0.06 were obtained. The Young's modulus varied between E = 928
+/- 40 GPa and E = 1098 +/- 43 GPa. Anomalous dispersion of the SAWs on th
e nucleation side was observed in some samples. In addition the mean veloci
ty of the SAWs was generally higher on the nucleation side than on the grow
th side. This indicates that the elastic properties changed considerably du
ring the growth process. Measurements of the grain size by scanning electro
n microscopy (SEM), of the phase purity by Raman spectroscopy, and the text
ure by X-ray diffraction (XRD) were performed in order to estimate the cont
ribution of different effects to the dispersion and the side dependence of
the SAW velocities. In addition Fourier transform infrared (FTIR) spectrosc
opy was applied to study the influence of the hydrogen content. (C) 2001 El
sevier Science B.V. All rights reserved.