Nanoindentation of CVD diamond: comparison of an FE model with analytical and experimental data

This paper describes an experimental procedure for the determination of the hardness and the elastic modulus through nanoindentation of a CVD diamond coating using simple analytical formulae. Such tests, performed with a Berk ovich indenter, were simulated by finite element analysis. Through the nume rical analysis, it was possible to reproduce the load-penetration depth cur ves and thus, confirm the validity or correct the property calculations. Re sults show that the predicted property values can be affected by the assume d material strain hardening. By comparing the numerical values with the exp erimental results, it is possible to characterise, with sufficient accuracy , the material behaviour. (C) 2001 Elsevier Science B.V. All rights reserve d.