Amorphous SixC1-x films: an example of materials presenting low indentation hardness and high wear resistance

Amorphous SixC1-x films, with x ranging from 0 to 0.4, were grown by high-e nergy ion beam deposition. The mechanical properties of these materials hav e been studied: indentation hardness, elastic modulus, wear resistance and scratch damage. It has been shown that the wear resistance and indentation behavior could not necessarily be correlated. Although these films do not s how as high a hardness as other amorphous carbon films, their excellent wea r resistance and thermal stability, as well as their very good adherence, m ake them suitable as protective coatings. (C) 2001 Elsevier Science B.V. Al l rights reserved.