The optical properties of epitaxial aluminum nitride (AlN) films grown on s
apphire, SiC, and Si substrates have been investigated in the (2-6.3) eV ph
oton energy range using cathodoluminescence (CL) at liquid nitrogen tempera
ture. Besides a broad luminescence band at 3.2 eV the CL spectra shows mult
iple, relatively narrow excitonic features in the near band-edge region at
approximately 6.1 eV. The nature of the excitonic transitions is discussed
and an estimate of the band-gap energy is given. (C) 2001 Elsevier Science
B.V. All rights reserved.