EXTENDED ENERGY-LOSS FINE-STRUCTURE ANALYSIS OF HARD AND ELASTIC CARBON NITRIDE THIN-FILMS

In this article an electron energy loss spectroscopy investigation of CNx thin films is reported. The bonding, composition. and structure ar e discussed and a more thorough extended energy loss spectroscopy inve stigation is carried out to determine the interatomic distances. The e xtended energy loss fine structure analysis reveals a component with a n unusually high frequency in the data corresponding. to an interatomi c distance of approximately 7.3 Angstrom. This is suggested to origina te from backscattering from distant curved atomic layers. (C) 1997 Ame rican Institute of Physics.