New planar lightwave circuit (PLC) platform eliminating Si terraces and its application to opto-electronic hybrid integrated modules

Authors
Yamada, T Hashimoto, T Ohyama, T Akahori, Y Kaneko, A Kato, K Kasahara, R Ito, M
Citation
T. Yamada et al., New planar lightwave circuit (PLC) platform eliminating Si terraces and its application to opto-electronic hybrid integrated modules, IEICE TR CO, E84B(5), 2001, pp. 1311-1318
Citations number
9
Categorie Soggetti
Information Tecnology & Communication Systems
Journal title
IEICE TRANSACTIONS ON COMMUNICATIONS
ISSN journal
09168516 → ACNP
Volume
E84B
Issue
5
Year of publication
2001
Pages
1311 - 1318
Database
ISI
SICI code
0916-8516(200105)E84B:5<1311:NPLC(P>2.0.ZU;2-W
Abstract
We have developed a new planar lightwave circuit (PLC) platform eliminating Si terraces for hybrid integrated optical modules. This PLC platform has t he advantage of a lower fabrication cost than the conventional PLC platform with an Si terrace, because it does not require fabrication processes such as Si terrace forming and mechanical polishing. Using our new PLC platform structure, we fabricated a transceiver for optical access networks and an 8-channel multichannel photoreceiver for wavelength division multiplexing ( WDM) interconnection systems.