Nature and occurrence of defects in 6H-SiC Lely crystals

Synchrotron white beam topography has been applied to study defects in 6H-S iC platelets grown by the Lely method. In addition, high resolution X-ray d iffraction, chemical etching, capacitance-voltage and photoluminescence mea surements were carried out to confirm and complement the topography results . The occurrence of structural defects such as various misorientations, dis locations, stacking faults and precipitates are classified into grown-in an d post-growth defects. The results are related to the assumed growth proces s of the differently shaped platelets. (C) 2001 Published by Elsevier Scien ce B.V.