A full vectorial three-dimensional beam-propagation method (BPM) based on t
he finite-element method is described for the analysis of second harmonic g
eneration (SHG), Quasi-phase-matched SHG devices with periodically domain-i
nverted GaAlAs- and LiTaO3-based waveguides are analyzed. The influences of
the shape of domain-inverted regions and of the inversion width on the con
version efficiencies are investigated in detail. The results of full-wave a
nalysis are compared to those of approximate scaler analysis.