Effect of a bell-shaped cover in spin coating process on final film thickness

Thin polymer films can be prepared by spin coating with thicknesses ranging from nanometers to mi crometers. The film thickness is controlled by conce ntration of the polymer solution, molar mass of the polymer and spinning sp eed. The patented GYRSET system for spin coating applications provides a fu ndamental modification. The bell-shaped cover minimizes air turbulences ins ide the process chamber; therefore, better uniformity of the layer is produ ced. This leads to highly reproducible results, uniform coverage, and relia ble and uniform material application, in particular at lower spin speeds. W e focus on the question how does the GYRSET system change the final film th ickness. In particular, we have investigated modifications of the existing spin coat equation for solutions of polystyrene dissolved in toluene using the GYRSET system. In addition, we compare homogeneity of films prepared by open spin coating and GYRSET systems.