Optical properties of boron nitride thin films deposited by microwave PECVD

Authors
Soltani, A Thevenin, P Bath, A
Citation
A. Soltani et al., Optical properties of boron nitride thin films deposited by microwave PECVD, MAT SCI E B, 82(1-3), 2001, pp. 170-172
Citations number
3
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY
ISSN journal
09215107 → ACNP
Volume
82
Issue
1-3
Year of publication
2001
Pages
170 - 172
Database
ISI
SICI code
0921-5107(20010522)82:1-3<170:OPOBNT>2.0.ZU;2-0
Abstract
Hexagonal boron nitride thin films (h-BN) were deposited by microwave PECVD on various substrates (silicon, quartz, glass...), and were analysed by in frared, UV visible and microraman spectroscopies. The interpretation of the IR spectra recorded at oblique incidence allowed us to determine the prefe rential orientation of the c-axis of the h-BN films. The influence of the d eposition conditions on the orientation is studied as a function of the pla sma power. The optical constants in the infrared are also given by the Kram ers-Kronig method. (C) 2001 Elsevier Science B.V. AII rights reserved.