Ym. Grigor'Ev et al., The phase composition and structure of the products of thermolysis of organosilicon gas mixtures under extremal heat load conditions, RUSS J PH C, 75(5), 2001, pp. 742-746
The phase composition and the structure of solid ceramic materials based on
Si, C, and N were studied by the electrothermographic and IR spectroscopy
methods. The ceramics were synthesized by chemical vapor deposition from Si
(CH3)(4) and Si(CH3)(4) + NH3 + H-2 under extremely high rates of heated ob
ject temperature variations. Algorithms for synthesizing (SiC4)-(C-C) nanoc
omposite materials, amorphous SiC, twophase (SiC,Si3N4) products, and (Si-N
-C) carbonitride composites were developed.