Flexible biomedical microdevices with double-sided electrode arrangements for neural applications

Micromachined devices with substrate-integrated electrodes are the key comp onents in implantable microsystems for recording of neural signals or elect rical stimulation of nerves. So far, electrodes have been located on only o ne side of the microsystems. In this paper, a technology has been developed to fabricate multichannel microelectrodes that are located on the top side and the back side of a flexible device. The process technology for polyimi de-based devices is described, prototypes of implantable microdevices with double-sided electrodes, called flexible nerve plates, have been fabricated . Results are discussed on scanning electron microscopy. cross-sections, an d first electrochemical characterizations of the electrodes. (C) 2001 Elsev ier Science B.V. All rights reserved.