Characterizations of VO2-based uncooled microbolometer linear array

Vanadium dioxide (VO2) thin films are materials for uncooled microbolometer due to their high temperature coefficient of resistance (TCR) at room temp erature. This paper describes the design and fabrication of eight-element u ncooled microbolometer linear array using the films and micromachining tech nology. The characteristics of the array is investigated in the spectral re gion of 8-12 mum. The fabricated detectors exhibit responsivity of over 10 kV/W, detectivity of approximate 1.94 x 10(8) cm Hz(1/2)/W, and thermal tim e constant of ii ms, at 300 K and at a frequency of 30 Hz. Furthermore, the uncorrected response uniformity of the linear array bolometers is less tha n 20%. (C) 2001 Elsevier Science B.V. All rights reserved.