Vacuum are deposition of Ti, TiN and TiO2 decorative coatings on glass

Citation
A. Cantarero et al., Vacuum are deposition of Ti, TiN and TiO2 decorative coatings on glass, B S ESP CER, 40(2), 2001, pp. 138-142
Citations number
20
Categorie Soggetti
Material Science & Engineering
Journal title
BOLETIN DE LA SOCIEDAD ESPANOLA DE CERAMICA Y VIDRIO
ISSN journal
03663175 → ACNP
Volume
40
Issue
2
Year of publication
2001
Pages
138 - 142
Database
ISI
SICI code
0366-3175(200103/04)40:2<138:VADOTT>2.0.ZU;2-U
Abstract
In a vacuum are discharge, highly ionised species are formed, which permits an effective control of the deposition process and, particularly, to depos it Ti, TiN and TiO2 coatings on non-conducting materials like glass. Moreov er this technique allows us to position a mask between the substrates and t he sheets to be coated. Another advantage of the vacuum are technology is t he low substrate temperature during the deposition. Data on the roughness, composition and corrosion resistance in architectural glass mask-coated wit h titanium nitride and oxide are presented and analysed in this work. A com parative analysis is made with reactive direct current sputtering and plasm a enhanced chemical vapour deposition techniques.