In a vacuum are discharge, highly ionised species are formed, which permits
an effective control of the deposition process and, particularly, to depos
it Ti, TiN and TiO2 coatings on non-conducting materials like glass. Moreov
er this technique allows us to position a mask between the substrates and t
he sheets to be coated. Another advantage of the vacuum are technology is t
he low substrate temperature during the deposition. Data on the roughness,
composition and corrosion resistance in architectural glass mask-coated wit
h titanium nitride and oxide are presented and analysed in this work. A com
parative analysis is made with reactive direct current sputtering and plasm
a enhanced chemical vapour deposition techniques.