Photoelectrochemical deposition of metallic oxide (PbO2, RuOx, NiOOH, and C
oOOH) onto a Ti substrate was studied and the electrochemical behavior of t
he prepared Ti/TiO2/MOx electrodes was examined. The photoelectrochemical d
eposition of MOx occurred in the solutions containing Mn+ ions on the Ti su
bstrate under anodic bias. Electron holes produced on the TiO2 film surface
under illumination may contribute the MOx formation. The prepared Ti/TiO2
/MOx electrodes showed a tunneling current under anodic bias.