Surface-micromachined 2-D optical scanners with high-performance single-crystalline silicon micromirrors

We have developed a novel batch-fabrication single-crystalline silicon micr omirror bonding process to fabricate optically flat micromirror on polysili con surface-micromachined two-dimensional (2-D) scanners. The electrostatic ally actuated 2-D scanner has a mirror area of 460 mum x 460 mum and an opt ical scan angle of +/-7.5 degrees. Compared with micromirror made by standa rd polysilicon surface-micromachining process, the radius of curvature of t he micromirror has been improved by 150 times from 1.8 to 265 cm, with surf ace roughness < 10 nm.