A chip-level integrated optoelectronic modulation circuit is described for
high-speed digital interconnects. This circuit is composed of an electroabs
orption modulator with surface-normal operation at 1550-nm wavelengths and
a high-speed electronic driver. A growth/etch/regrowth procedure is used to
fabricate the multiple-quantum well modulators and the heterojunction bipo
lar transistors (HBTs) of the circuit on a common InP substrate. The measur
ed bandwidth is approximately 30 GHz.