P. Miao et al., Electrostatic generation and theoretical modelling of ultra fine spray of ceramic suspensions for thin film preparation, J ELECTROST, 51, 2001, pp. 43-49
An electrostatic atomization technique has been developed to generate ultra
-fine spray of ZrO2 and SiC ceramic suspensions with a droplet size of abou
t 4 mum and a narrow size distribution for preparing thin films. It is well
known that electrostatic atomization in cone-jet mode is the most suitable
technique to generate the desired aerosol. Experimental and modelling resu
lts showed that droplet size and spray current obey theoretical prediction
of scaling law and that droplet transport process is in agreement with expe
rimental observation. ZrO2 and SIC thin films prepared this way were found
to be homogenous. (C) 2001 Elsevier Science B.V. All rights reserved.