The chemical shifts of the K alpha radiation line from Al, Si, and Ge ions
between their elemental and oxide forms are calculated within the framework
of density functional theory using ultrasoft pseudopotentials. It is demon
strated that this theoretical approach yields quantitatively accurate resul
ts fur the systems investigated, provided that relaxations of the valence e
lectrons upon the core-hole transition are properly accounted for. Therefor
e, such calculations provide a powerful tool for identification of impurity
states based on x-ray fluorescence data. Results for an Al impurity implan
ted in silica are found to be in excellent agreement with experimental data
, providing support for the proposed atomic geometry.