Kinetic simulation model of magnetron discharges - art. no. 056408

A self-consistent kinetic model of plasma in the entire gap of a magnetron cylindrical discharge, with all quantities varying in radius and with the u niform magnetic field being directed axially. is presented. The discharge m odeling is performed on the basis of a numerical solution of the spatially inhomogeneous Boltzmann kinetic equation together with equations of ion mot ion, current balance, and Poisson's equation. The model represents an examp le of discharge description from cathode to anode with respect to strong no nlocality effects in the distribution function formation. Based on the resu lts for a typical magnetron discharge condition, the distribution functions , field, and macroscopic properties calculated for the entire discharge in argon, are presented and discussed.