The analysis of grain growth mechanisms is carried out by the investigation
of the correlation between texture and average grain size in polycrystalli
ne silver films deposited by e-beam evaporation. The results indicate that
the ion bombardment can enhance the texture evolution by changing the drivi
ng force for abnormal grain growth. This effect is attributed to the enhanc
ed desorption of impurities from the free surface of the films due to ion b
ombardment. (C) 2001 Elsevier Science Ltd. All rights reserved.