D. Gracin et al., Quantitative analysis of a-Si1-xCx : H thin films by vibrational spectroscopy and nuclear methods, VACUUM, 61(2-4), 2001, pp. 303-308
Thin amorphous hydrogenated silicon-carbon films, a-Si1-xCx:H were deposite
d by magnetron sputtering on glass and mono-crystalline substrates with car
bon content from x = 0.2 to 1, wide variation of hydrogen concentration and
different degrees of structural ordering. The obtained films were investig
ated by Fourier transform infra-red (FTIR) spectroscopy, Raman spectroscopy
, Rutherford backscattering (RBS) and elastic recoil detection analysis (ER
DA). The results of the quantitative analyses obtained by the above-mention
ed techniques were compared. It has been concluded that the applied vibrati
onal methods can be used quantitatively which enables estimation of the deg
ree of chemical ordering in the analysed samples. (C) 2001 Elsevier Science
Ltd. All rights reserved.