Micromechanical and microtribological properties of thin CNx and DLC coatings

Authors
Staedler, T Schiffmann, KI
Citation
T. Staedler et Ki. Schiffmann, Micromechanical and microtribological properties of thin CNx and DLC coatings, ADV ENG MAT, 3(5), 2001, pp. 333
Citations number
23
Categorie Soggetti
Material Science & Engineering
Journal title
ADVANCED ENGINEERING MATERIALS
ISSN journal
14381656 → ACNP
Volume
3
Issue
5
Year of publication
2001
Database
ISI
SICI code
1438-1656(200105)3:5<333:MAMPOT>2.0.ZU;2-2
Abstract
Diamond-like carbon (DLC) can be used as a tribological coatings in mechani cal engineering to reduce friction and wear. As well as the amorphous carbo n nitride system (CNx), it is also interesting for various applications in the hard-disk and microsystems industries. Here, examples of the influence of film thickness and substrate on the mechanical and tribological properti es of thin CNx and DLC films in the low-load regime are analyzed and discus sed.