Kinetic modelling of a discharge-pumped ArF excimer laser and the effects of discharge filamentation

Results of kinetic modelling of an X-ray preionised, discharge-pumped ArF e xcimer laser, operating with a spiker-sustainer circuit are presented. The parallel-resistor model includes the complete ArF laser kinetics and calcul ations of the Boltzmann equation in each layer taking into account the effe cts of election-electron and super-elastic collisions. The model further in cludes a detailed description of the electrical circuit and the formation o f filaments with a realistic electrode profile. This model shows a good cor respondence with the experimental results in predicting laser energy and op tical behaviour. Neglecting the formation of filaments and the electron-ele ctron and super-plastic collision processes yields remarkably poorer result s. Parametric studies on the electrode profile, the formation of micro-arcs and on the electrical circuit parameters were performed numerically.