We demonstrate subwavelength spatial resolution with a scanning microlens o
perating in collection mode with a large-area detector. Optical contrast is
created by refraction of off-axis light rays at angles larger than the max
imum collection angle. With a microfabricated silicon microlens 10 mum in d
iameter, we measure spatial resolution due to refraction contrast of lambda
/4.3 at a wavelength of lambda =10.7 mum. A model based on ray tracing is
developed to explain our result, and we show that lens diameter and index o
f refraction limit resolution for large emission and collection angles. (C)
2001 American Institute of Physics.