Microstamping of freestanding bipolymer features

Citation
Pm. Moran et C. Robert, Microstamping of freestanding bipolymer features, APPL PHYS L, 78(23), 2001, pp. 3741-3743
Citations number
8
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science
Journal title
APPLIED PHYSICS LETTERS
ISSN journal
00036951 → ACNP
Volume
78
Issue
23
Year of publication
2001
Pages
3741 - 3743
Database
ISI
SICI code
0003-6951(20010604)78:23<3741:MOFBF>2.0.ZU;2-#
Abstract
Microscale bipolymer features have been fabricated by microstamping. Rigid silicon stamps with microwells as small as 40 fl in volume were used. Bipol ymer columns, 2 mum by 2 mum in cross section and 10 mum tall, were stamped from these small microwells. The top 1.5 mum of each column was made of po lyetherimide with the remaining 8.5 mum being made from an ethyl cyanoacryl ate. The ability to accurately fabricate microscale features consisting of more than one polymer has many potential uses. As an example, the potential use of bipolymer features in nerve guides is discussed. (C) 2001 American Institute of Physics.